JPH0246856U - - Google Patents
Info
- Publication number
- JPH0246856U JPH0246856U JP12538288U JP12538288U JPH0246856U JP H0246856 U JPH0246856 U JP H0246856U JP 12538288 U JP12538288 U JP 12538288U JP 12538288 U JP12538288 U JP 12538288U JP H0246856 U JPH0246856 U JP H0246856U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- vacuum container
- arm
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000013077 target material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12538288U JPH0246856U (en]) | 1988-09-26 | 1988-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12538288U JPH0246856U (en]) | 1988-09-26 | 1988-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0246856U true JPH0246856U (en]) | 1990-03-30 |
Family
ID=31375943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12538288U Pending JPH0246856U (en]) | 1988-09-26 | 1988-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0246856U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0585380U (ja) * | 1992-04-20 | 1993-11-19 | 株式会社鈴木製作所 | ミシンの針留め |
-
1988
- 1988-09-26 JP JP12538288U patent/JPH0246856U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0585380U (ja) * | 1992-04-20 | 1993-11-19 | 株式会社鈴木製作所 | ミシンの針留め |